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Mems/Nems

(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS

© 2006

Hard cover - Print (ISBN: 978-0-387-24520-1)

Electronic (ISBN: 978-0-387-25786-0)

Soft cover - Print (ISBN: 978-1-4899-7739-7)

View this book on SpringerLink

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