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Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

© 2005

Hard cover - Print (ISBN: 978-3-540-22109-8)

Soft cover - Print (ISBN: 978-3-642-06048-9)

Electronic (ISBN: 978-3-540-26876-5)

View this book on SpringerLink