Results

Book cover

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

© 2005

Hard cover - Print (ISBN: 978-3-540-22109-8)

Electronic (ISBN: 978-3-540-26876-5)

Soft cover - Print (ISBN: 978-3-642-06048-9)

View this book on SpringerLink

Download Product Archive File - 978-3-540-26876-5 Download product archive files for 978-3-540-26876-5