ISBN: 3-540-65629-4
TITLE: Deposition of Diamond-Like Superhard Materials
AUTHOR: Kulisch, Wilhelm A.M.
TOC:

1. The Material Property Hardness 1
1.1 Definition of Hardness 1
1.2 Hardness Measurements 2
1.3 Hard Materials 5
1.3.1 Ideal Materials 5
1.3.2 Real Materials 8
1.4 Correlations with Other Material Properties 12
1.4.1 Hardness versus Volumetric Lattice Energy 12
1.4.2 Hardness and Bulk Modulus 13
1.4.3 Model of Kisly 15
1.4.4 Model of Cohen 16
2. Diamond-Like Materials 21
2.1 Materials 21
2.2 The B/C/N System 21
2.2.1 Materials in the B/C/N System 22
2.2.2 Carbon and Boron Nitride 23
2.3 Properties of Diamond-Like Materials 27
2.3.1 Thermal and Vibrational Properties 29
2.3.2 Optical and Electronic Properties 32
2.4 State of the Art 35
2.4.1 Diamond 35
2.4.2 Tetrahedral Amorphous Carbon 36
2.4.3 Cubic Boron Nitride 38
2.4.4 beta-C_3N_4 40
2.5 Organization of the Remainder of this Book 41
3. Growth Mechanisms 43
3.1 On the Deposition of Thin Films 43
3.2 Growth of Diamond Films 44
3.2.1 Methods for Low-Pressure Diamond Synthesis 44
3.2.2 Gas Phase Processes 47
3.2.3 Transport Processes 59
3.2.4 Surface Processes 63
3.2.5 Macroscopic Diamond Growth 74
3.2.6 Conclusions 77
3.3 Growth of c-BN Films 79
3.3.1 Methods and Parameters 79
3.3.2 Gas Phase and Transport Processes 87
3.3.3 Ion-Induced Mechanisms 88
3.3.4 Modeling of c-BN Growth 89
3.3.5 The Sputter Model 93
3.3.6 Conclusions 101
3.4 Growth of ta-C Films 105
3.4.1 Experimental Observations 106
3.4.2 Growth Mechanisms 108
3.4.3 Conclusions 111
3.5 Growth of CN Films 112
3.5.1 Experimental Observations 112
3.5.2 Discussion 117
3.6 Conclusions 120
4. Nucleation Mechanisms 125
4.1 On the Theory of Nucleation 125
4.1.1 Macroscopic Thermodynamic Description 125
4.1.2 Statistical Thermodynamic Description 128
4.1.3 Atomistic Description 129
4.1.4 Influence of Surface Defects 131
4.1.5 (Hetero)epitaxy 132
4.1.6 Nucleation of Superhard Materials 133
4.2 Nucleation of Diamond 134
4.2.1 General Considerations134
4.2.2 Nucleation on Untreated Substrates 136
4.2.3 Nucleation on Highly-Oriented Graphite 138
4.2.4 Abrasive Treatment 140
4.3 Bias-Enhanced Nucleation of Diamond 141
4.3.1 General Considerations 141
4.3.2 Experimental Observations 144
4.3.3 Discussion and Modeling 155
4.4 Nucleation of c-BN 159
4.4.1 Experimental Observations 160
4.4.2 Mechanisms of Nucleation 163
4.5 Nucleation of taC and beta-C_3N_4 167
4.6 Conclusions 168
References 173
Index 187
END
